Hi Santanu,
First start investigating functionally.
Start executing with one equipment. If no error you increase the span until you find the equipment which triggers this error. Means the measuring point/s which trigger this error. If this is the case and you've arrived at a measuring point, then there might be a problem of characteristics used. Even you should look into this equipment master also, whether anything went wrong while creating MPs on this.
If you've confirmed that this is not the case, then this has to be addressed technically.
Jogeswara Rao K